SYNTHESIS OF CARBON NANOTUBES WITH NI-TI CATALYST
Ключевые слова:
carbon nanotubes, synthesis, chemical vapor deposition (CVD), catalyst, magnetron sputtering.Аннотация
Carbon nanotubes have been of interest to the scientists for about 30 years due to their unique
properties. Their use as a material for creating flexible conductive coatings, supercapacitors, batteries and solar cells
is promising because of their excellent mechanical and electrical properties, as well as high electrochemical stability.
In this paper, we consider one of the methods for the synthesis of carbon nanotubes on a Ni-Ti bimetallic catalyst on
a silicon substrate. The effect of the thickness of the catalytic layer and the synthesis temperature on the quality of
the obtained samples was studied. The synthesis was carried out by the CVD method as the most convenient
technique with the possibility of a large yield of the final product. The obtained samples were studied by scanning
electron microscopy and Raman spectroscopy. It was found that with an increase in the synthesis temperature and a
decrease in the thickness of the catalytic layer, the crystallinity of the structure improves the number of defects in the
structure decreases and structural ordering increases. The use of a catalyst and an adhesive metal layer, which was a
barrier between the catalyst and the substrate, shows good results in improving the quality of the synthesis of
nanotubes.